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Enquiries: NRC-IMS
Phone: 613-949-9660
Fax: 613-957-8734
Email: ims.info@nrc-cnrc.gc.ca
Ottawa, Montreal Road Research Facilities
1200 Montreal Road
Ottawa,
Ontario,
K1A 0R6
Canada
Driving Directions to the Ottawa, Montreal Road Research Facilities
NRC Institute for Microstructural Sciences Facilities
- ADS Magnetron Sputtering Deposition System (IMS)
- Atomic Force Microscopy
- Atomic Layer Deposition
- BAK Evaporation Deposition System (IMS)
- BAP Ion-Plating Deposition System (IMS)
- Bruker D8 Discover High-Resolution X-Ray Diffraction System
- Canadian Photonics Fabrication Centre
- Chemically Assisted Ion Beam Etching (CAIBE)
- Contact aligners (Optical Lithography)
- Direct-write Electron Beam Lithography Facility
- Direct-write optical lithography system
- Ellipsometer
- Hitachi S-4700 Field-Emission Scanning Electron Microscope
- Incubation (Business/Technology) at IMS/IIT - IPF Ottawa
- Inductively Coupled Plasma Reactive Ion Etching (ICP RIE)
- Infrared Variable-angle spectroscopic ellipsometer (IR-VASE) for near- and mid-IR, with cryostat accessory, J.A. Woollam Co. (IMS)
- JEOL-JEM-2100F Field Emission Transmission Electron Microscope
- Lambda 900 Spectrophotometer for visible and near-IR, with accessories, Perkin Elmer (IMS)
- Metal Evaporation
- Nanotemplate Chemical Beam Epitaxy system (IMS)
- PANalytical MRD High-Resolution X-Ray Diffractometer
- PE983 Spectrophotometer for near- and mid-IR with reflectance accessory, Perkin Elmer (IMS)
- Plasma-Enhanced Chemical Vapor Deposition (PECVD)
- Raman Scattering Spectroscopy
- Rapid Thermal Annealing
- Riber 32P III-V Chemical Beam Epitaxy system (IMS)
- Scanning Auger Microscope and Spectrometer
- Scanning Electron Microscope (SEM)
- Secondary ion mass Spectrometry (SIMS)
- Semiconductor Device Design & Test
- Semiconductor Devices Fabrication
- Semiconductor Material Characterization & Analysis
- Semiconductor-related Deposition
- Spector Dual-Ion-Beam Sputtering (DIBS) Deposition System, Veeco-IonTech (IMS)
- Stress analyzer
- SVTA S35N Nitride Molecular Beam Epitaxy system (IMS)
- TSN Evaporation Deposition System (IMS)
- V80 Arsenides Molecular Beam Epitaxy system (IMS)
- V90 Multi Group V Molecular Beam Epitaxy system (IMS)
- Variable-angle spectroscopic ellipsometer (VASE) for visible and near-IR, J.A. Woollam Co. (IMS)
- X-Ray Photoelectron Spectroscopy
