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Variable-angle spectroscopic ellipsometer (VASE) for visible and near-IR, J.A. Woollam Co. (IMS)
Variable-angle spectroscopic ellipsometry (VASE) is a versatile and powerful optical technique for the investigation of the optical properties (complex refractive index) and thickness of thin films. The technique is based upon the analysis of the change of polarization of light, which is reflected off a sample, this analysis being performed at several angles of incidence of the probing beam, and on a range of wavelengths. Ellipsometry can probe the complex refractive index, which gives access to fundamental physical parameters and is related to a variety of sample properties, including morphology, crystal quality, chemical composition, or electrical conductivity. It is commonly used to characterize film thickness for single layers or complex multilayer stacks ranging from a few angstroms or tenths of a nanometre (thinner than the wavelength of the probing light itself) to several micrometers with an excellent accuracy.
This particular VASE instrument is equipped with a XY-stage allowing mapping of the surface of samples, and can perform measurements under a continuous flow of dry nitrogen for measurements on samples that are sensitive to air exposure. The wavelength range covered by this VASE is 350—1700nm, and the angles of incidence can be set between 25° and 90° (grazing angle). This instrument can be isolated from external light through the use of curtains, which allows it to be use for polarized-light absolute transmittance and reflectance measurements at normal or oblique angles.
