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Infrared Variable-angle spectroscopic ellipsometer (IR-VASE) for near- and mid-IR, with cryostat accessory, J.A. Woollam Co. (IMS)
Variable-angle spectroscopic ellipsometry (VASE) is a versatile and powerful optical technique for the investigation of the optical properties (complex refractive index) and thickness of thin films. The technique is based upon the analysis of the change of polarization of light, which is reflected off a sample, this analysis being performed at several angles of incidence of the probing beam, and on a range of wavelengths. Ellipsometry can probe the complex refractive index, which gives access to fundamental physical parameters and is related to a variety of sample properties, including morphology, crystal quality, chemical composition, or electrical conductivity. It is commonly used to characterize film thickness for single layers or complex multilayer stacks ranging from a few angstroms or tenths of a nanometre (thinner than the wavelength of the probing light itself) to several micrometers with an excellent accuracy.
The IR-VASE has a Fourier transform infrared (FTIR) spectroscope source allowing to probe light from 2 to 30 microns (333 to 5000 cm-1). The measurements can provide information on chemical bonding, free carrier absorption, dopant concentration and profile, and phonon absorption. The instrument is equipped with a rotating compensator for increased sensitivity, and has a cryostat accessory for measurements at cryogenic temperatures using N2 or He as a coolant.
