Common menu bar links
Related Information
Institutes & Programs
- NRC Canadian Photonics Fabrication Centre
- NRC Centre for Surface Transportation Technology
- NRC Genomics and Health Initiative
- NRC Imaging Network Portal
- NRC Institute for Aerospace Research
- NRC Institute for Biodiagnostics
- NRC Institute for Information Technology
- NRC Institute for Microstructural Sciences
- NRC Institute for Research in Construction
- National Institute for Nanotechnology
- National Research Council Canada
Key Sectors
Areas of Research
Communities
Careers
Events
Contact
Sylvain Charbonneau
Phone: 613-998-9414
Fax: 613-957-8734
Email: Sylvain.Charbonneau@nrc-cnrc.gc.ca
Semiconductor Devices Fabrication
Nanofabrication
- 4,000sq/ft of clean room (class 10,000/1000)
- Direct write e-beam lithography – JEOL 6000FSE & JEOL 840
- Contact lithography - Karl Suss MJB3
- Maskless Optical Lithography - Intelligent Micro-Patterning SF-100
- ICP-RIE – Oxford Instruments PlasmaLab 100
- CAIBE - Oxford Instruments IonFab 300
- PECVD - Oxford Instruments PlasmaLab 100 & PlasmaTherm
- E-beam, thermal, and sputter deposition of metals – e.g. Edwards Auto-306
- RTA – AG Associates 410, Jipelec JetFirst
- Cleaving, thinning, and wire bonding
- SEM – Hitachi 4700FE & JEOL 6400FE
- AFM – Pacific Nanotechnology
- VASE - Variable angle spectroscopic ellipsometry - Woollam
- Stress measurement – Tencor
- Sem-automatic Flip-Chip Bonder - Laurier M9
