Common menu bar links
Related Information
Institutes & Programs
- NRC Canadian Photonics Fabrication Centre
- NRC Centre for Surface Transportation Technology
- NRC Genomics and Health Initiative
- NRC Imaging Network Portal
- NRC Institute for Aerospace Research
- NRC Institute for Biodiagnostics
- NRC Institute for Information Technology
- NRC Institute for Microstructural Sciences
- NRC Institute for Research in Construction
- National Institute for Nanotechnology
- National Research Council Canada
Key Sectors
Areas of Research
Communities
Careers
Events
Contact
Sylvain Charbonneau
Phone: 613-998-9414
Fax: 613-957-8734
Email: Sylvain.Charbonneau@nrc-cnrc.gc.ca
Semiconductor Material Characterization & Analysis
Characterization
- TEM/STEM - JEOL JEM 2100F with an Oxford EDS and a Gatan EELS
- TEM (sample preparation)
- Gatan 691 ion polishing systems
- Allied High Tech Products Tripod Polisher
- Buehler precision metallurgical saw
- VCR Group D500i Dimplers
- FIB FEI 820 Dual Beam workstation
- Mitutoyo lift-out tool
- Fischione Model 1010 low angle milling and polishing system
- SEM - Hitachi 4700FE with image processing capabilities (Northern Eclipse and Image Pro Plus)
- SIMS - Physical Electronics Adept 1010 (with shallow-depth-profiling capability)
- SAM - Physical Electronics 650
- SAM - Ulvac-Phi 700
- XPS - Physical Electronics 5500 (with <0.5 eV resolution)
- AFM/SCM - Veeco DI Nanoscope III
- AFM - Enviroscope Veeco DI
- XRD (powder) - Panalytical 1820 with specular/diffuse scattering capability
- XRD (high resolution) - Panalytical MRD with simulation software
- XRD (high resolution) - Bruker D8 Discover (High Resolution) with in-plane diffraction and environment control capabilities
- Raman (micro) - Horiba Jobin Yvon LabRam with microscope coupled FTIR
- Raman (high resolution) Horiba Jobin Yvon T64000 triple monochromator
- DEI - Dynamic Electroluminescence (~100 ps resolution & 0.5 mm spatial)
- Spectrophotometers:
- Perkin Elmer Lambda 19
○○ Perkin Elmer Lambda 900 (including reflectance)
○○ Perkin Elmer 983 IR
○○ Cary 50 UV-Visible Spectrophotometer - Ellipsometer (Spectroscopic) – Woollam
- FTIR - Nicolet Nexus-470
- DSC - TA Instrument 2050
- TGA - TA Instrument 2010
- Potentiostat - Solartron 1285
- Fluorescence Spectrometer - ISA Jobin Yvon SPEXFL-3
- PR-650 Spectracolorimeter and electroluminescence characterization facility
- Fluorescence Microscope - Nikon Eclipse 80I
- Contact Angle Analyzer (dynamic) - FTA200
